| 摘要 |
PURPOSE:To improve the crystallizing property of the lower conductor of a Josephson element and to enable to realize the Josephson element having uniform characteristics by a method wherein the lower conductor is directly formed on a substrate consisting of a single crystal substrate. CONSTITUTION:A lower conductor 4 and a control line 8 have been formed on a single crystal substrate 1. A second insulating layer 7 has been formed in such a way as to cover this control line 8 and an upper conductor 6 has been formed extending from the surface of an insulating thin film 5 formed by oxidizing one part of the surface of the conductor 4 to the surface of the layer 7. A first insulating layer 3 has been formed extending from the surface of this conductor 6 to one part of the surface of the conductor 4, where the film 5 has not been formed on the conductor 4, and a gland plane 2 has been formed thereon. According to such a constitution, the conductor 4 has a favorable crystallinity, because the conductor 4 is directly formed on the substrate 1, thereby enabling to uniformly form the film 5, which has made the conductor 4 oxidize, with a favorable reproducibility and enabling to realize a Josephson element having uniform characteristics.
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