| 摘要 |
PURPOSE:To enable the stable detection and control of the bottom temperature of a crucible in the pulling of a single crystal from molten liquid under magnetic field, by separating the thermocouple from the crucible shaft, and contacting the thermocouple indirectly to the crucible bottom via a cap. CONSTITUTION:The crucible 2 containing the molten liquid 3 is supported by the hollow shaft 9 and heated with the heater 5. A magnetic field is applied to the crucible 2 by the magnet 8, and the crystal 4 is pulled up under rotation by the crystal pulling and rotating device 7. The thermocouple 17 covered with the protection tube 16 is inserted into the shaft 9 preventing the contact of the tube 6 with the shaft 9. The protection tube 16 is brought into contact with the crucible bottom via the cap 21 made of a material having high thermal conductivity and lubricity, e.g. boron nitride. The temperature of the crucible bottom can be detected and controlled stably by this process without being influence with the magnetic field. |
