发明名称 |
Electronic optical apparatus comprising pyrolytic graphite elements |
摘要 |
The electronic optical apparatus provided is such that the parts situated in the immediate vicinity of the beam, anode, screen placed inside the condenser block, screen formed from a tube and limiter diaphragms inside the deflection block, screen placed between the final focussing lens and the sample to be observed and the secondary electron collector electrode have their faces exposed to the electron beam formed from pyrolytic graphite.
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申请公布号 |
US4508967(A) |
申请公布日期 |
1985.04.02 |
申请号 |
US19830457233 |
申请日期 |
1983.01.11 |
申请人 |
CAMECA |
发明人 |
BOISSEL, PIERRE;TONG, MATHIAS |
分类号 |
H01J37/16;G01Q30/02;G01Q30/18;H01J37/02;H01J37/26;(IPC1-7):G01N23/00 |
主分类号 |
H01J37/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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