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发明名称
SPIN DRIER
摘要
申请公布号
JPS6064436(A)
申请公布日期
1985.04.13
申请号
JP19830173546
申请日期
1983.09.19
申请人
FUJITSU KK
发明人
MOTOKI YASUNARI;OOKUMA YUUJI
分类号
F26B5/08;F26B7/00;F26B11/08;G03F7/40;H01L21/304
主分类号
F26B5/08
代理机构
代理人
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