发明名称 TOOL FOR WIRE BONDER
摘要 PURPOSE:To improve abrasion resistance, and to lengthen life by implanting the ions of a material of the same kind as a material for a tool or harder than the material for the tool to the lower end of the tool. CONSTITUTION:The ions of a material of the same kind as a material for a tool or harder than the material for the tool are implanted to the lower end of the tool 1 to prevent dispcharge to the outside of bubbles existing in a blank. Accordingly, the nose of the tool further hardens, and abrasion resistance is improved. Discharge to the outside of bubbles is prevented, wires do not adhere, and life is lengthened.
申请公布号 JPS6066441(A) 申请公布日期 1985.04.16
申请号 JP19830174198 申请日期 1983.09.22
申请人 SHINKAWA:KK 发明人 KOBAYASHI TOMIO
分类号 H01L21/60 主分类号 H01L21/60
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