| 摘要 |
PURPOSE:To obtain a proper and faithful ultrasonic microscope image and improve convenience by providing a light emitting means and a photodetecting means at the circumference of an acoustic lens and detecting the inclination of a sample surface, and correcting it automatically. CONSTITUTION:Detecting means 32 and 33 detect the inclination of the surface of the sample from the spot diameter of a light beam which is incident to the surface of the sample 38 at a prescribed angle of incidence and reflected by the surface. A control circuit 36 has a reference value set for determining the permissible inclination range of the sample corresponding to the extents of inclination of the means 32 and 33 and compares the extents of inclination with the reference value to output a control signal. Sample table correcting means 29 and 30 is provided successively to a sample table 28 and control the inclination of the sample table 28 with the inclination control signal of the circuit 36. Therefore, the surface of the sample 37 is corrected automatically to obtain the proper and faithful ultrasonic microscope image and also eliminates the trouble of the manual adjustment of the inclination of the surface of the sample 37, thereby realizing easy handling. |
