| 摘要 |
PURPOSE:To measure the flying height of a magnetic head automatically by using a glass disk, and detecting the contour shape of a magnetic head and light- part and dark-part peak generation positions of interference fringes and deciding on the degree from the detection signal of an interference image on a photoelectric surface during homogeneous wavelength irradiation. CONSTITUTION:Luminous flux from a xenon light source 15 is made incident on a monochromator 16 and split into two by a half-mirror 4 through a removal lens 17 for light quantity unevenness and lens 18. One is incident on a floating spacing part between the glass disk 5 and a slider 6 through the glass disk 5 and reflected as interference light corresponding to the flying height. Then, an interference pattern is formed on a light quantity converting part 21 through the half- mirror 4, mirror 19, and lens 20 to output an electric signal corresponding to interference fringes. Then the output signal of the photoelectric converting part 21 is inputted to a converting part 23 to perform horizontal and vertical synchronous separation. Those timing signals are inputted to an A/D converter 24 and the memory address control circuit 29 of a frame memory 30. Then, an arithmetic part 32 calculates the flying height from brightness data.
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