发明名称 PRECISION MOVING APPARATUS
摘要 PURPOSE:To realize accurate positioning by providing a sliding plate to a slider through leaf springs and changing the sliding resistance of the slider by changing the pressure of fluid injected from ports of a brush in contact with the sliding plates. CONSTITUTION:As a slider (a) is moved in a direction as indicated by an arrow, a sliding plate (b) supported by leaf springs (c) is moved in the same direction as the slider. For stopping the operation, the T-shaped sliding plate (b) is pressed by a brush (d) through a spring (g) and a roller (e), and subjected to the sliding resistance, whereby the slider (a) is stopped. Thus, the fluid pressure applied to the brush (d) is increased while the slider is running, and decreased when it approaches the stopping position. Accurate positioning can be realized by this method without causing vibration after stopping. The brush (d) is made of Teflon or graphite material, phosphor bronze, or aluminum ceramic. When a porous material is employed, the brush need not be provided with fluid injection ports.
申请公布号 JPS60140722(A) 申请公布日期 1985.07.25
申请号 JP19830250550 申请日期 1983.12.27
申请人 CANON KK 发明人 SUZUTA MIKIO;YAMAMOTO SEKINORI;NAKAZAWA KAZUO
分类号 H01L21/30;B23Q1/26;B23Q1/28;G03F7/20;G03F9/00;G12B3/08;G12B5/00;H01L21/027;H01L21/67;H01L21/68 主分类号 H01L21/30
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