| 发明名称 |
Process for forming metal patterns wherein metal is deposited on a thermally depolymerizable polymer and selectively removed |
| 摘要 |
A process for forming a desired metal pattern on a substrate which comprises forming a mask of a thermally depolymerizable polymer on the substrate with a pattern of openings complementary to the desired metal pattern, blanket coating the substrate and the mask with a metal, heating to depolymerize the thermally depolymerizable polymer, and removing the thermally depolymerizable polymer and metal thereover in a mild solvent.
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| 申请公布号 |
US4539222(A) |
申请公布日期 |
1985.09.03 |
| 申请号 |
US19830556733 |
申请日期 |
1983.11.30 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ANDERSON, JR., HERBERT R.;ARAPS, CONSTANCE J.;LOTSKO, CATHERINE A. |
| 分类号 |
H01L21/3205;H01L21/027;H01L21/306;H01L21/3105;(IPC1-7):H01L21/285 |
主分类号 |
H01L21/3205 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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