METHOD FOR CONTROLLING AN RF GENERATOR

摘要

In one embodiment, an RF generator includes an RF amplifier comprising an RF input, a DC input, and an RF output, the RF amplifier configured to receive at the RF input an RF signal from an RF source; receive at the DC input a DC voltage from a DC source; and provide an output power at the RF output; and a control unit operably coupled to the DC source and the RF source, the control unit configured to receive a power setpoint indicative of a desired output power at the RF output; determine a power dissipation at the RF generator; alter the DC voltage to decrease the power dissipation at the RF generator; and alter the RF signal to enable the output power at the RF output to be substantially equal to the power setpoint.

主权项

1. An RF generator comprising:
an RF amplifier comprising an RF input, a DC input, and an RF output, the RF amplifier configured to:
receive at the RF input an RF signal from an RF source;receive at the DC input a DC voltage from a DC source; andprovide an output power at the RF output; and a control unit operably coupled to the DC source and the RF source, the control unit configured to:
receive a power setpoint indicative of a desired output power at the RF output;determine a power dissipation at the RF generator;alter the DC voltage to decrease the power dissipation at the RF generator; andalter the RF signal to enable the output power at the RF output to be substantially equal to the power setpoint.