| 摘要 |
PURPOSE:To obtain monosilane efficiently for a short time by bringing hydrochlorosilane (mixture) into contact with a specific deposited catalyst. CONSTITUTION:1,8-Diazobicyclo[5,4,0]-undecene-7 (salt) (DBU) is dissolved in alcohol such as methanol, and a carrier such as silica and alumina is added thereto and after stirring the mixture, the methanol is distilled off therefrom and the mixture is heated and dried under reduced pressure as it is to obtain a catalyst deposited with DBU. Then, hydrochlorosilane (mixture) such as dichlorosilane having >=1/2 H/Cl by atomic ratio is brought into contact with said deposited catalyst at 0-400 deg.C for a short time and the produced equilibrium mixture is rectified to obtain monosilane.
|
