| 摘要 |
PURPOSE:To enable continuous vacuum exhaust by connecting the coldness generating part of a single coldness generating means to each cryo-panel, shifably to the transmission of coldness, and enabling each of said cryo-panels to be regenerated. CONSTITUTION:Cryo-panels 40a, 41a, 40b, 41b are installed in cryo-panel chambers 22a, 22b, and an expanding machine 31 is connected, shiftably to the transportation of coldness, to the cryo-panels 40a, 41a, 40b, 41b, through a coldness transporting means 15 which transports coldness generated by an expanding machine 31 to the cryo-panels 40a, 41a, 40b, 41b. A regenerating means 60 for each of the cryo-panels 40a, 41a, 40b, 41b is provided, shiftably to regeneration, in each of the cryo-panel chambers 22a, 22b. Thereby, a low-cost cryopump can be obtained, which can continuously vacuum exhaust a chamber 20 to be exhausted, without need for additionally providing a coldness generating means which constitutes a cryopump, e.g., a helium refrigerator 30.
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