| 摘要 |
PURPOSE:To make a rotating brush come close to or separate from the surface of substrate and avoid generation of an excessive pressing force by providing a motor for driving rotating brush and an actuator for moving upward or downward the arm to a movable base and then lifting the arm with a flexible line strip. CONSTITUTION:A movable base 2 which moves forward or backward with a motor 3 is provided between a pair of guide rails 1a and 1b provided opposed to each other, a pair of arms 4a, 4b are also provided rotatably to the base 2 and a rotating brush 5 is supported by them. An actuator consisting of an air cylinder 6 and a slide block 7 is comprised within the base 2, the one end of wire rope 8 is attached to a block 7 while the other end is coupled to the arm 4b. With such structure, the air cylinder 6 is compressed for the brushing of the surface of semiconductor substrate 11 to lift the arm 4b and brush 5, moving the base 2. Thereby, the cylinder 6 is extended and the arm 4b and brush 5 are dropped on the substrate 11. |
