| 摘要 |
PURPOSE:To stabilize various characteristics such as resonance frequency characteristics and to mass-produce highly reliable piezoelectric vibrators easily by finishing at least the main surface of the piezoelectric substrate like a mirror. CONSTITUTION:A synthetic resin-made case 3 is formed by a pair of uper and lower half cases 1 and a piezoelectric element 2 having a vibrating substrate 5 in an expanding vibration mode is stored in the case 3. At the formation of the piezoelectric element 2, a metallic material 13 having constant elasticity is rolled in the cold condition by a roller 14 to work the material 13 as a thin plate 15 having a prescribed thickness. One side or both the sides of the thin plate 15 is finished like a mirror by a mirror surface grinding method such as a barrel grinding method. Then, the surface of the thin plate 15 is masked 16 and a united frame 4 consisting of the vibrating substrate 5, both couplers 6 and a holding frame 7 is formed by etching work. The piezoelectric element 2 is held in the case 1 by the holding frame 7 so as to be contacted at points. Consequently, various characteristics such as the resonance frequency characteristics are stabilized and the reliability of the piezoelectric vibrator is improved.
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