摘要 |
PURPOSE:To enable the feed of stable gas, by a method wherein gas permeated through a selected gas permeable film cell is dehumidified, and pulsation is removed from the gas to exhaust it. CONSTITUTION:An air 30 flows through a main film cell 31 which is normally in use and an auxiliary film cell 32 which is adapted to control oxygen concentration and a flow rate, and after the film is selectively permeated by oxygen, enriched gas flows to a vacuum pump 33. The enriched gas, flowing through the vacuum pump 33, flows through a dehumidifying chamber 36 which is adapted to remove a moisture content. A part of the gas produced thereat is fed back by a feedback control 37, and the remaining gas flows through a buffer chamber 38 in order to remove pulsation to fetch it as enriched gas for combustion. A flow rate of gas exhausted is controlled through the working of a valve 97 by means of an exhaust port 93 for regulating the flow rate and the pressure of a final necessary oxygen enriched gas. |