| 摘要 |
PURPOSE:To make output stable without fail regardless of any temperature fluctuation of detector by a method wherein a passivation film formed on a semiconductor photodetecting element is preliminarily made rough by etching process utilizing an active agent produced by plasma discharged from halogenide gas. CONSTITUTION:A multichannel type scintillator element 3 is bonded to a multichannel type photodiode 4 coated with passivation film 11 through the intermediary of a transparent adhesive 12 making each channel align with one another. The passivation film 11 mainly formed of silicon dioxide by vapor growing process to protect photodiode elements 6 is made rough by etching process utilizing an active agent produced by low temperature plasma of halogenide. Through these procedures, the adhesive 12 may be prevented from peeling off even under forcible thermal impulse since the bonded surface adhere firmly with each other due to the roughness of passivation film 11 regardless of the difference in the linear coefficient of expansion between the scintillation element 3, the photodiode element 6 and the transparent adhesive 12. Resultantly, any output may be made stable without fail. |
