| 摘要 |
PURPOSE:To hold heat escaping through a crucible from an evaporating metal and improve the efficiency of evaporation, by providing the space between the hearth liner of an evaporating metal source and the crucible and also sustaining the both by the small contact area at an electron beam evaporation apparatus. CONSTITUTION:The hearth liner 5 for the evaporating metal 8 in an electron beam vacuum evaporation apparatus is made of the high melting point material such as BN or TiB2 etc. of which the wetting to the melted evaporating metal is scarce and the thermal conductivity is small. A space 7 is set between the hearth liner 5 and the crucible 4, also the hearth liner is sustained on the crucible 4 by the protrusion part 6 of a narrow cross section. As the heat of the melt of the evaporating metal 8 escapes hardly to the crucible 4 due to the small thermal conductivity of the hearth liner 5 and the space 7, the evaporating metal 8 can be evaporated effectively by the low input electron beam. |
