| 摘要 |
PURPOSE:To execute a stable thermal pressure welding by executing a sputter by mixing O2 in a sputter gas Ar. CONSTITUTION:Magnetic head parts 2-4 consisting of ceramic or ferrite are placed on a table 11 of a sputter device, a degree of vacuum of a sputter chamber 7 is set to 3X10<-4>Pa by a vacuum pump 12, and a mixed gas of Ar and O2 is led into the sputter chamber 7 from a gas bomb 6. Subsequently, electric power of 150W is supplied to a target glass 8 from a power source 9, and a sputter is executed about 1.5hr. By setting a ratio of Ar and O2 to 95:5-90:10, a composition of PbO can be stabilized, a variation of a composition of a lead glass thin film 1 is suppressed, and a stable thermal pressure welding can be executed. As a result, the composition of the lead glass thin film becomes constant, and an adhesion failure can be prevented, and the yield is improved. |
