| 摘要 |
PURPOSE:To manufacture a high-precision and reliability ink jet recording head by annealing at a higher temperature of glass transition point of a cured film after cutting the downstream side of a passage. CONSTITUTION:A protection layer 3 is covered by an ink discharge energy generating element 2 such as piezo-electric element as a heating element on a substrate 1. Then a photomask 5 with a prearranged pattern is overlapped on a dry film photoregist 4 on the substrate and exposed to light starting with the uppermost photomask. The photomask is dissolved and removed by a developer of organic solvent to form an ink passage. Next, the dry film photoregist 4P remaining on the substrate 1 is either thermally cured or treated by ultraviolet ray for the improvement of ink resistance. A flat plate 7 is fixed with an adhesive as a cover of the substrate 1 with an ink passage 8 formed by the dry film photoregist 4P. Later, the head is annealed at higher temperature than the glass transition point of a cured film of a photosensitive resin used for the formation of an ink passage. |
