发明名称 HETERO JUNCTION FIELD EFFECT TRANSISTOR
摘要 PURPOSE:To reduce noise, and to increase gm by providing a junction on the surface of the semiconductive layer between a source electrode and a schottky gate electrode, thereby increasing the surface potential of the semiconductive layer adjacent to the junction. CONSTITUTION:A GaAs layer 2 is epitaxially grown on a GaAs base board 1, and a Si dope, N type AlXGa1-XAs (x=0.3) layer 3 is epitaxially grown on the layer 2 to form a hetero junction 4. A schottky gate electrode 5, a source electrode 5, and a drain electrode 7 are formed on the layer 4, and further a P type AlXGa1-XAs is formed on the layer 3 between the source electrode 6 and schottky gate electrode 5. In this case, a source region 8 is formed through the layer 13, layer 3, and layer 2, and the source electrode 6 is formed on the layer 13. With the layer 13, a p-n junction 14 is formed between the layer 13 and layer 2, and the built-in potential of the junction 14 increases the surface potential of the layer 3, thereby decreasing the noise and increasing the gm.
申请公布号 JPS61102072(A) 申请公布日期 1986.05.20
申请号 JP19840224763 申请日期 1984.10.25
申请人 SONY CORP 发明人 KATO YOJI
分类号 H01L29/812;H01L21/338;H01L29/778 主分类号 H01L29/812
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