| 摘要 |
PURPOSE:To measure exactly the positions of plural points on an object by comparing a known design position with the positions of plural points detected by a sensor, correcting a detected position, and also transferring a corrected position of plural points to the next processing system. CONSTITUTION:After a hole position has been recognized by a device 1, a hole to be inspected goes into a visual field of a microscope 9 and is inspected successively by an inspecting system constituted of an X - Y table 10, the microscope 9, a television camera 8, and an inspecting computer 7 of a hole. A video signal obtained by picking up its image of an object to be inspected 6 by a television camera 5 is converted to a digital signal by an A/D converter 4, and thereafter, it is accumulated. In these data, an inclination against the object to be inspected 6 of the television camera, or a deformation caused by an image distortion of the television camera 5 is seen. In this case, from this raw data, center coordinates Xi, Yi of each hole are derived, displayed by polar coordinate displays r1, psi1 formed by using center coordinates X0, Y0 of a circle as an origin, and through an operation, the hole position is corrected. In this way, the positions of plural points on an object can be detected exactly.
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