| 摘要 |
PURPOSE:To obtain water with controlled purity, by providing a conductivity detection means to the outflow side of a pure water apparatus and refluxing a part of treated water to the upstream side on the basis of detection signal of a detection means. CONSTITUTION:A water quality analyser 3 is provided to inspect raw water used in regeneration and said raw water is used after the absence of a reactive ion was confirmed. When the ion is contained in raw water, a change-over valve 2 is closed and pure water of a pure water tank 13 treated by a pure water apparatus 7 is sent to the pure water apparatus 7 by a water feed pump 5, while return piping 19 and a change-over valve 20 are opened, to be regenerated. When abnormality is generated, treated water can be again sent to the pure water apparatus 7 through the return piping 19 to receive re-treatment.
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