| 摘要 |
PURPOSE:To improve dust removing effect and to make treated articles cleaner by providing an apparatus for ejecting cleaning gas communicated to a chamber to be cleaned by blowing up dusts, and an apparatus for excluding the dusts out of the chamber. CONSTITUTION:A pressurizing pump 11 of a first apparatus 9 is driven and air is ejected as clean air into each chamber 3, 4, 5 through a filter 13, thus, the dusts accumulated in the corners of each chamber also are blown up. A pressurizing pump 14 of a second apparatus 10 is started when the valves of all separated chambers 2 are opened and the dusts are blown up, and air is passed through the vacuum vessel 1 after it has been cleaned by passing through a filter 16. As the result, the blown-up dusts are expelled out of the vacuum vessel 1 through an exhausting duct 17. By operating each pressurizing pump 11, 14 for a desired time, such as several hr - ten several hr, the inside of each chamber 6, 7, and 8 is cleaned. |
