| 摘要 |
PURPOSE:To realize alignment even when an alignment mark is missing and improve the yield of integrated circuit by executing positioning through calculation based on the positioning data of adjacent shot for the short for which detection of alignment mark signal is impossible due to the missing. CONSTITUTION:In the arrangement of the shots A-I and alignment marks A1, A2-I1, I12 on a wafer, alignment is carried out by obtaining deviation between reticle and wafer from the right and left alignment marks A1-I2 for each shot A-I. In the shot E, the alignment marks E1, E2 are missing. Therefore, a means value of deviations of adjacent shots A-D, E-G of the shot E and this mean value is defined as the deviation between the reticle and wafer of shot E for the positioning. Thereby, the yield of integrated circuit can be improved. |
