| 摘要 |
PURPOSE:To form a flawless vertical magnetic recording thin film by precipitating barium ferrite on a substrate held below a specific temperature in the plasma composed of the alkoxide steam made of Ba and Fe, an inert carrier gas and a reaction gas. CONSTITUTION:The magnetic recording thin film is made of Ba(OR)2 and Fe(OF)3, where the R means alkyl such as C2H5. First, a carrier gas Ar is blown into bubblers 16 and 17 and sent to a reaction chamber 11. Then an upper high frequency electrode 12 in the chamber 11 precipitates the barium ferrite on a substrate 15 placed on a heating holder 14 by a plasma CVD method to form the vertical magnetized film pointed completely to an axis C. In order to form the magnetized film, the substrate is held below 350 deg.C, and plasma generating electric power and the pressure to maintain the plasma are preferably 0.5W/m<2>-10W/cm<2> and 0.1-10Torr, respectively. In such a way, the excellent magnetic recording medium can be available without the deformation and deterioration of the polyimido on the substrate.
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