| 摘要 |
PURPOSE:To mitigate the stress on the outer periphery near joints by forming a rotor so that the rigidity of the outer periphery near the joints between a rotor ring and rotor blades is made lower than that of the inside. CONSTITUTION:Recessed grooves 2b are formed on the outer periphery 2a near joints between the rotor ring 2 of a rotor and rotor blades 3 in a turbo- molecular pump. Since recessed grooves 2b are formed near the outer periphery 2a, the rigidity of the outer periphery 2a is decreased, and the flow of stress is decreased. Since rotor blades 3 on the outer periphery are elastically supported by the rotor ring 2, the stress concentration due to the rotor blades 3 on the outer periphery 2a is decreased, thus the reliability of the rotor is improved.
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