| 摘要 |
PURPOSE:To adjust rapidly and accurately so that a pattern to be measured is brought to a specified position by calculating adjustment quantity including position and interval, etc. to the standard display information thereof from image data obtained by picking up the pattern to be measured and adjusting the display position of the pattern to be measured. CONSTITUTION:First, image data front he imaging area 13a of the ITV camera 13 are sent to the dot position arithmetic part 22 where deviation quantities Xa and Ya to a standard display position of dot A to be located at the center are obtd. Then, the deviation quantities between each position of dots B-E and each position of x2, y1; x1, y2; x3, y1; and x1, y3 are obtd. in a similar manner. Based on the deviation of dot A, the distances Xla, Yu2, Xr3 and Yl3 of dots B-E are calculated. Comparison/judgement section 23 receives data of deviations and distances, and calculates adjustment quantities of the positions in the X- and Y-axes directions and of intervals between the positions of dots as well as of linearity by a specific equation. Each adjustment quantity is sent to the pattern adjustment section 24 to adjust the display position of the pattern.
|
