Method of manufacturing a geodetic component and integrated optical device comprising said component

摘要

A method of manufacturing a geodetic-optical component is described in which non-spherical rotationally symmetrical recesses are formed in a surface of a substrate, and the surface with the recesses are covered with a planar waveguide. This technique forms the recesses in a laminated substrate having a number of layers of varying etching rates, and then etching these layers to form cup-shaped recesses.