| 摘要 |
PURPOSE:To improve the characteristics of a vertically magnetized film by mainly using Fe and rare earth elements or these elements and Co and employing light rare earth elements mainly comprising Nd and Pr as rare earth elements. CONSTITUTION:Nd and Pr are used as 70% or more in rare earth elements R and one kind or more of Ce, Y, Yb, etc. as the remainder, and the range of R extends over 21-60at%. Co of less than 30% in the whole composition is substituted for residual Fe in R, the remainder is shaped by one kind or more of an element M, such as Ni, Zr, Sb, etc. of less than 10at% of the whole composition, and the thickness of a thin-film is brought to 0.3mum or more. Since the temperature of a substrate must be kept at a temperature up to the crystallizing temperature or lower of an alloy composition from 180 deg.C or higher in order to acquire a vertically magnetized film, elements capable of resisting said temperature are employed. Accordingly, the characteristics of the vertically magnetized film are improved.
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