| 摘要 |
PURPOSE:To obtain a dicing tape which exhibits an excellent adhesion during dicing, can provide an easy pickup of chips because of reduction in adhesion after heat treatment and causes no problem with residual adhesive, by interposing a specific intermediate layer between a base layer made of a plastic film and an adhesive layer. CONSTITUTION:A 5-200mu-thick intermediate layer comprising an ethylenic copolymer such as ethylene-ethyl acrylate copolymer and 0.01-20wt% anionic surface active agent such as alkylbenzenesulfonate is interposed between a 5-200mu-thick adhesive layer obtd. by mixing an ethylene-vinyl acetate copolymer having a vinyl acetate content of 7-70% or a blend of the ethylene-vinyl acetate copolymer with a styrene-isoprene block copolymer, with a tuckifier such as a terpene resin and a stabilizer such as BHT and molding the mixture and a 10-200mu-thick base film layer made of PVC, PE or the like to form an intended dicing tape. If necessary, a 0-100mu-thick second intermediate layer made of PE may be interposed between the adhesive layer and the intermediate layer.
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