| 摘要 |
PURPOSE:To improve reliability without the deterioration of the characteristic of a thin soft magnetic film pattern by using the thermally decomposed matter of metallic alkoxide as an adhesive agent in the joint part of at least one point. CONSTITUTION:The thin soft magnetic film pattern 3 is formed by using a photolithographic technique on a substrate 1. A soln. 5 prepd. by dissolving the metallic aloxide is coated on the surface of the substrate 1, i.e., the surface of an insulating layer 2. A protective plate 4 consisting of ceramics, ferrite, etc. is adhered onto the surface on which the soln. prepd. by dissolving the metallic alkoxide is coated. The coating is subjected to a heating treatment under the load (p) exerted thereto. The solvent is evaporated and further the cured amorphous polymer is obtd. by the heating treatment. The polymn. of the amorphous polymer progresses more as the polymer is heated. The hard adhered layer of the metallic oxide is thus obtd. The concn. and viscosity are preferably adjusted to set the small thickness of the adhesive layer. The amorphous polymer 6 consists essentially of the metallic oxide having the insulating characteristic and has therefore the characteristic of high hardness. The wear resistance and durability are thereby remarkably improved. |
