| 摘要 |
PURPOSE:To improve the mass production effect by providing an optical sensor array, an analog switch array consisting of thin film transistors TRs and a shift register consisting of plural thin film TRs. CONSTITUTION:A device consists of an optical sensor array part 12 on an insulating substrate 11, an analog switch array part 14 provided for individual optical sensors 13, and a shift register part 15 which drives the array part 14. A semiconductor thin film 17 of less defects consisting of the same materials as optical sensors 13 or materials different from them is formed on the insulating substrate 11, and a drain electrode 18 and a source electrode 19 are provided on this film 17, and a gate insulating film 20 is formed, and a gate electrode 21 is provided finally, thus constituting a thin film TR 16d. Contact holes 22 are provided for wiring to the other elements and are connected to connections formed preliminarily simultaneously with drain electrodes 18 and source electrodes 19. Thus, the mass production effect is improved considerably.
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