| 摘要 |
PURPOSE:To perform the supply of a platelike body during its delivery, by installing a holding device, holding the platelike body placed one stage upper on that at a lowermost stage. CONSTITUTION:When a wafer ring body 1 is discharged out of a post 13 by a discharge projection 15, the body 1 at the second from the bottom drops downward but since support claws 19-22 enter notches 2, the second body 1 is supported by these support claws 19-22 whereby it is in no case dropped to the extent of tables 5 and 6. The body 1 discharged outside by the discharge projection 15 moves in a C direction, placed on a table 29, and the wafer ring body 1 being emptied as lots of dies are taken out by a pickup further moves in a D direction and housed in a housing device 32. Next, since the body 1 is supported by these support claws 19-22, the discharge projection will not catch the body 1 so that a moving body 16 is made shiftable to a B direction.
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