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发明名称
METHOD AND DEVICE FOR VAPOR PHASE SYNTHESIS
摘要
申请公布号
JPS6210274(A)
申请公布日期
1987.01.19
申请号
JP19850148267
申请日期
1985.07.08
申请人
SUMITOMO ELECTRIC IND LTD
发明人
OSAKA HAJIME
分类号
C23C16/44;C23C16/458
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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