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发明名称
DEFECT DETECTING METHOD FOR THIN FILM
摘要
申请公布号
JPS6213042(A)
申请公布日期
1987.01.21
申请号
JP19850151631
申请日期
1985.07.10
申请人
MATSUSHITA ELECTRONICS CORP
发明人
SATO KAZUO
分类号
G01N1/32;G01N1/28;H01L21/31;H01L21/66
主分类号
G01N1/32
代理机构
代理人
主权项
地址
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