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发明名称
VAPOR GROWTH DEVICE
摘要
申请公布号
JPS6273618(A)
申请公布日期
1987.04.04
申请号
JP19850212166
申请日期
1985.09.27
申请人
TOSHIBA CORP
发明人
MUTO YUHEI;SAGARA MINORU;SUHARA MOTOI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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