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发明名称
DUST PREVENTING SYSTEM OF ROTARY MECHANISM
摘要
申请公布号
JPS6298740(A)
申请公布日期
1987.05.08
申请号
JP19850238942
申请日期
1985.10.25
申请人
TOKYO ELECTRON LTD
发明人
YANAGI YOSHIAKI
分类号
F24F7/06;B08B5/02;H01L21/67;H01L21/677;H01L21/68
主分类号
F24F7/06
代理机构
代理人
主权项
地址
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