| 摘要 |
A semiconductor substrate transport system includes a semiconductor substrate holder for holding semiconductor substrates to be transported, a linear pulse motor for driving and reciprocating the semiconductor substrate holder, a pulse oscillator connected to the linear pulse motor, an arrangement for holding a clearance of the linear pulse motor, and guide for guiding the reciprocating motion of the linear pulse motor. The semiconductor substrate holder, the linear pulse motor, the clearance holding arrangement and the guide are installed in a chamber which is brought into a vacuum atmosphere, whereby the appearance of dust during the transport of the semiconductor substrates can be suppressed, and the available percentage and throughput of the semiconductor substrates processed or to be processed by a semiconductor production apparatus can be enhanced.
|
