| 摘要 |
PURPOSE:To inexpensively improve the wear resistance and seizure resistance of bodies by generating glow discharge under the reduced pressure in a reaction vessel, introducing suitable raw materials into the vessel and successively coating ceramic films consisting of metallic elements and non-metallic elements on the surfaces of bodies. CONSTITUTION:Plural pieces of the bodies 14a-14n such as shafts made of an inexpensive and easily formable cast iron are set by means of a support 13 of a base plate 12 to the inside of the reaction vessel 11 of a film forming device 10 consisting of the reaction vessel 11 having gas introducing and discharge pipes 20, 21 and provided internally with a porous electrode 16 and a gas diffusing plate 17 to the concentrical shaft and are heated to a prescribed temp. Gaseous raw materials are then introduced into the reaction vessel 11 and the glow discharge is generated under the reduced pressure between the electrode 16 and the bodies 14a... by a high-frequency power source 18. The ceramic film consisting of the metallic elements such as Ti, Al, and W is thereby formed on the bodies 14a.... The gaseous raw materials are then changed over and similarly the ceramic film consisting of the non-metallic elements such as Si and B is formed with good adhesiveness on the ceramic film consisting of the above-mentioned metallic elements. The shaft having the excellent wear resistance is thus obtd. without gouging the other side.
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