| 摘要 |
PURPOSE:To apply the defect inspection of an information recording disc such as an optical disc in a short time and for the entire recording area by using a 2-dimensional sensor as a sensor detecting a defect. CONSTITUTION:An object to be inspected 1 is fitted to a spindle 2 and driven. Then a controller 11 is activated to oppose the 2-dimensional sensor 5 to the optional region of the object 1 to be inspected. In irradiating a light 4a for the inspection to the object 1 to be inspected via a half mirror 3 via a light source 4, the light is reflected in a recording film 1a and made incident on the 2-dimensional sensor 5 via the half mirror 3. In switching a shutter provided between the half mirror 3 and the sensor 5, the reflected light at each phase of the object 1 is made incident on the 2-dimensional sensor 5 continuously, an analog signal in response to the incident light intensity is digitized and recorded sequentially in a data memory 7. Then a data from a normal pattern generator 8 is read, the pattern matching processing of both data is applied in a CPU 9 to discriminate the presence of a defect.
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