| 摘要 |
PURPOSE:To form multicomponent evaporated film having a fixed compsn. by proceeding coevaporation by feeding back the signal voltage of an evaporation speed monitor provided to an evaporation source having slow response as referential voltage for a differential amplifier provided to an evaporation source having high evaporation speed. CONSTITUTION:Thin film constituted of a fixed ratio of mixture produced by an evaporation source 2 using electron beam having high response speed and by a resistance heating source 1 having low response speed is formed on a base plate 10 to be treated. A differential amplifier 6 is provided between a power source 5 for feeding electric power to the resistance heating source 1 and a monitor 3, and an input terminal for the negative side is provided to the monitor side and a positive side of the input terminal is held at a referential voltage 7. Further, a differential amplifier 8 is connected to an evaporation source 2 side using electron beam. Under this condition, signal voltages obtd. from the monitor 3 are inputted as there are to the positive side input terminal 9 of the differential amplifier 8 for controlling the evaporation source using electron 2 beam. By this constitution, since the response of the electron beam evaporation source 2 is quick, the evaporation rate is varied in accompany with the variation of the resistance heating source 1, and evaporated film having a fixed mixing ratio is obtd.
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