| 摘要 |
PURPOSE:To make a sample observable in a high fidelity state, by installing a main exhaust vacuum pump being formed to exhaust a sample exchange chamber and a sample chamber, and also reserve exhaust system exhausting an auxiliary pump for this main pump and a sample intake reserve exhaust chamber. CONSTITUTION:A sample to be observed is installed in a sample exchange chamber 7 and preliminary exhaust is carried out by a main exhaust vacuum pump 9. In this case, a main valve 8 is closed in advance, and a valve 16 is opened instead, thus the preliminary exhaust taken place for the sample exchange chamber 7. After vacuum comes to a high degree and after the main valve 8 is opened since the valve 16 has closed, a valve 6 is opened whereby the sample is led into a regular position inside a sample chamber 5. The vacuum pump 9 uses such a pump that does not use oil for a turbo-molecular pump or the like. With this constitution, the sample is observable in a high fidelity state.
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