发明名称 TRAY
摘要 PURPOSE:To ensure the vacuum suction and holding of housing articles and to permit the use of a pyramid-shaped collet by a method wherein such a space as the outside air is intruded into a part of the bottom of each article housed in each housing recess is provided on the bottom of each housing recess. CONSTITUTION:A chip tray 4 is formed into a structure wherein housing recesses 5, each consisting of a rectangular recess, are provided in a longitudinally and laterally aligned state on the main surface of a main body 9 consisting of a rectangular plate. The recesses 5 are coupled through one shallow groove 10 provided at the centers of their bottoms. When a sucking surface 2 of a collet 1 is confronted on the recess 5 of the tray 4 while a vacuum suction is performed utilizing a hole 3 of the collet 1, a chip 6 is levitated toward the sucking surface 2. At this time, as an atmospheric pressure is acted to the region facing on the groove 10, the chip 6 is thrusted up upward from a pressure difference. Thereby, the vacuum suction and holding of the chip 6 is ensured and the use of the pyramid-shaped collet becomes possible.
申请公布号 JPS62143438(A) 申请公布日期 1987.06.26
申请号 JP19850282940 申请日期 1985.12.18
申请人 HITACHI TOBU SEMICONDUCTOR LTD;HITACHI LTD 发明人 TANAKA MAKOTO;MURAKAMI NOBUO;FUKAMACHI MIKIO
分类号 H01L21/673;B65D85/38;B65D85/86;H01L21/67;H01L21/68 主分类号 H01L21/673
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