| 摘要 |
PURPOSE:To prevent the exfoliation phenomenon of the surface of each member in the high temperature environment by constituting a member which constitutes a ball screw from ceramics and coating the mutual slidable surface with a metal film. CONSTITUTION:A screw shaft 1 is made of alumina ceramics material, and a fixed nut 2, preload nut 3, and balls 5 are made of high carbon chrome bearing steel. Among them, at least the screw groove 1a of the screw shaft 1 is coated with silver as metal film M in the thickness of 1mum through the ion plating method. Therefore, each screw groove 1a-3a is coated with metal film M, and the part made of the ceramic material having the low thermal expansion coefficient endures the use for a long time in the high temperature environment, and exfliation phenomenon is prevented.
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