| 摘要 |
PURPOSE:To make an alignment without fail in a short time by a method wherein photodetectors are arranged during wafer transit while a carrier mechanism is provided with a position detectors to make alignment of the wafer referring to the results of processing the signals from position detectors. CONSTITUTION:A wafer 1 loaded upon a loading stage 4 of a carrier mechanism is carried along guide rails 5 in A direction. The wafer 1 in transit passes through a plurality of photodetectors 6 arranged to detect overall width of the wafer 1. At this time, the peripheral end of wafer 1 can be detected while the positions of loading stage 4 can be simultaneously detected as signals from position detectors. A processing circuit in a control circuit processes the direction and loaded position of wafer 1 corresponding to these signals. The control circuit controls the carrier mechanism and a rotary supporter 2 referring to the results of processing to align the central position of wafer 1 on the supporter 2 with the direction of an orientation flat 1a. Through these procedures, the alignment can be made without fail in a short time to cut down the delivery time of a wafer 1.
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