| 发明名称 |
Production method of thin film magnetic head |
| 摘要 |
In producing a magnetic head by thin film technique, a magnetic film is formed on an insulating member covering coil conductor films after the surface of the insulating member is flattened. After a flattening coating is formed on the insulating member, the flattening coating as well as the insulating member are etched by plasma-assisted etching technique in order to flatten the surface.
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| 申请公布号 |
US4685014(A) |
申请公布日期 |
1987.08.04 |
| 申请号 |
US19820403015 |
申请日期 |
1982.07.29 |
| 申请人 |
COMPUTER BASIC TECH ASS |
发明人 |
HANAZONO, MASANOBU;HARA, SHINICHI;AKIYAMA, HIROSI;HAYASHI, MASAAKI;SAITOO, HARUNOBU;KURISU, TAKUMI |
| 分类号 |
H01L21/31;G11B5/31;H01L21/302;H01L21/3065;(IPC1-7):G11B5/147 |
主分类号 |
H01L21/31 |
| 代理机构 |
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