| 摘要 |
PURPOSE:To produce a porous body having pores filled densely up to the inner parts by increasing stepwise or continuously the temp. of a porous base material when the pores in the base material are filled with a solid substance by pulse CVD. CONSTITUTION:When the pores in a porous base material such as a graphite material having continuous pores are filled with a filler such as SiC by pulse CVD, the base material is first heated to a temp. close to the lower limit of the temp. range in which CVD reaction takes place and gaseous starting material is introduced to selectively fill the internal pores. The temp. of the base material is then increased stepwise or continuously to enhance the depositing effect, and deposition in the pores in the surface layer of the base material is finished, completing the filling of all the pores. By this method, a porous body having continuous pores filled densely with a solid deposit from the surfaces to the inner parts is obtd.
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