发明名称 SURFACE GRINDING DEVICE
摘要 PURPOSE:To prevent quality from deteriorating due to adhesion of abrasive or etching phenomenon by transferring a processed workpiece within a short period of time and washing the workpiece by transferring a pressure mechanism from a processing position to a washing area along rails in a straight line movement. CONSTITUTION:When grinding is finished, a pressure plate 12 ascends. In the middle of the ascent, a transfer cylinder 23 starts transferring a pressure mechanism 3. At the same time, washing agent is injected from an intermediate nozzle 34 and a sub-nozzle 32 to a workpiece being transferred. When the pressure mechanism 3 reaches a washing area 5, the pressure plate 12 descends to place a main block 14 on a receiving table 30, injection from the intermediate nozzle and sub-nozzles is stopped, and washing liquid is injected from a main nozzle 31. Since transferring the pressure mechanism 3 to the washing area 5 is performed in a straight line movement along rails 21, the transfer distance is short and its movement is performed smoothly within a short period of time. Accordingly, the workpiece finished with processing can be transferred within a short period of time and washed. As a result, quality can be prevented from deteriorating due to adhesion of abrasive or etching phenomenon.
申请公布号 JPS62224563(A) 申请公布日期 1987.10.02
申请号 JP19860066260 申请日期 1986.03.25
申请人 SPEEDFAM CO LTD 发明人 MAEDA SEIICHI;ARAI HATSUYUKI
分类号 B24B7/00 主分类号 B24B7/00
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