| 摘要 |
PURPOSE:To inhibit the deformation of a base material and to improve the adhesive property of a ceramics layer, by incorporating as impurities specific substances to a ceramics layer to be allowed to adhere onto the metallic base material. CONSTITUTION:The ceramics layer containing, as impurities, inert gas, hydrogen, and one or more kinds among halogen elements is allowed to adhere onto the metallic base material so as to be formed into a member excellent in wear resistance. This member can be manufactured, for example, by a plasma CVD method. In the center of a reaction chamber 1, a cylindrical base material 10 is suspended from the ceiling of the chamber 1 via an insulator 2 with making its axial direction vertical in the center of an electrode 4. Then the base material 10 is heated by means of a heater 12 inserted in the center, and a gas prepared by mixing an inert gas such as Ar, etc., and a reaction gas with a gaseous starting material containing the components of the ceramics to be allowed to adhere is introduced into the chamber 1. At the same time, high-frequency electric power is impressed to the chamber 1 and the electrode 4 from an electric power source 14 to produce plasma between the electrode 4 and the base material 10, so that ceramics is allowed to adhere to the surface of the base material 10. At this time, SiH4, SiCl4, etc., are used as the gaseous starting material.
|
