| 摘要 |
PURPOSE:To enable any spilled chemical liquid to be discharged from a piping orifice and to prevent a spinning shaft, a driving motor and others from being attacked by the chemical liquid, by ending a vacuum suction bore in the spinning shaft in the midway thereof so as to provide a vacuum outside of the spinning shaft through a ventilation hole and the piping orifice on a housing for sucking a work by means of the vacuum. CONSTITUTION:A work 5 is held on the top face of a spinning chuck 15 in a treating chamber 11 by the spinning chuch 15 sucking the work 5 by means of vacuum. Chemical liquid or water is ejected from a fluid discharge nozzle 18 provided in an upper cup 11'. A vacuum suction bore 20 provided in a spinning shaft 16 is ended on the midway and connected to a piping orifice 31 on a housing 17 through a ventilation hole 25 and a communication hole 26. Thus. any chemical liquid spilled onto the spinning chuck 15 will be discharged out from the piping orifice 31. In this manner, the spinning shaft 16 and a driving motor can be effectively prevented from being attacked by the chemical liquid.
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